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# theory-RF-plasma | ||
# Theory of RF-plasma processes | ||
A document containing the basic physics of radio frequency (RF) plasmas | ||
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# Intention | ||
This document should give an insight to plasma processes ocuring in RF plasmas. | ||
Feel free to use it for practical usage or lectures. | ||
If you encounter mistakes, please report them or send a patch. | ||
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# How to generate the PDF | ||
The document was written using the LaTeX frontend [LyX](https://en.wikipedia.org/wiki/Lyx). Since it is nevertheless a LaTeX file, you should be able to generate the PDF using any LaTeX distribution of your choice. (Commonly used distributions are for example [MikTeX](https://en.wikipedia.org/wiki/MikTeX) and [TeX Live](https://en.wikipedia.org/wiki/TeX_Live).) |